Machine-Integrated Sensors for Motion Capturing
Sensorics Solutions
OEM Interferometers optimized for machine integration Customers can choose:
The growing demand for high accuracy position sensing in machine
tools requests cost efficient yet flexible sensors with high resolution at
potentially larg e working ranges. Up to today, interferometry has been
well known for highest accuracy but also high costs and demanding
space requirements, making it unattractive for mass application and
machine integration. • a wide range of interfaces (analog sin/cos, digital incremental, field busses)
• various sensor head designs for environments ranging from low
temperature to 400°C. Sensor head diameter from 1.2 mm up to 15.5 mm
• distance sensor head to target from 0 mm to > 5 meters
• target velocity up to 2 m/s
• direct beam or mirror deflection
• customized housing
attocube’s IDS3010 now solves this challenge: the ultra compact OEM
interferometer is an economic solution and optimized for machine inte-
gration with an unrivaled optical performance. Especially for applica-
tions exceeding the specifications of industry-wide used glass-scales,
the IDS3010 is capable of capturing motions more accurate than other
measurement systems.
TYPICAL APPLICATIONS
• Position sensing/control of stages in machine tool building or
semiconductor industry
• Increasing accuracy of conventional glass-scales, e.g. for testing
devices used in semiconductor inspection/backend markets
attoSENSORICS
Ultra Precision Sensors
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