Microscopy Solutions
PAGE 190
Nanotools
for Scanning Electron Microscopes sophisticated multi-degree-of-freedom solutions for SEM
attoAFM I for SEM
With a decade of experience in scanning probe microscopy, attocube has succeeded in equipping the attoAFM I with all the virtues important for successful operation inside a scanning electron microscope( SEM). Thanks to its extremely rugged design and miniaturized size, the force microscope can be fully integrated into almost any SEM currently available on the market. Its 45 ° tilted design allows full visual access to both AFM tip and sample using the SEM. Being compatible with virtually all commercially available cantilevers, the attoAFM I allows the user not only to image surface topographies, but also to visualize e. g. surface magnetic or electrostatic properties. Furthermore, by varying the stiffness of the cantilever, nanoindentation and tensile strength experiments can be easily conducted.
attoAFM III for SEM
Similar to the attoAFM I, the attoAFM III is an offshoot of attocube‘ s successful low temperature atomic force microscope series. In contrast to its cantilever-based counterpart, the attoAFM III uses a tuning fork sensor for ultra-sensitive topographic measurements. Due to the miniature size of the tuning fork sensor, the attoAFM III is even more compact than the attoAFM I, allowing simple integration into virtually any electron microscope currently available on the market. The zero-tilt design of the attoAFM III allows full visual access onto both sample and tip, while retaining the same coordinate systems for both SEM and AFM, making sample positioning and coarse approach a delight. The simple but powerful design of the attoAFM III has proven very successful in various applications, such as for the in-situ investigation of exposed, but undeveloped e-beam resist. attoPROBESTATION for SEM
The attoProbeStation is based on attocube’ s state-of-the-art, modular nanopositioning devices which can be equipped with optical or resistive encoders for closed loop operation( optional). The attoProbeStation consists of four probes which can be positioned independently of each other, allowing probe movement in Cartesian coordinates with sub-nm resolution in all directions. Each probe is electrically contacted by highest quality coaxial cables, ensuring low current, high signal-to-noise electrical measurements. In addition to the probe tips’ degrees of freedom, the attoPROBESTATION can also be equipped with translational and rotational positioners for the sample, hence enabling sophisticated device testing schemes in-situ.