attoPUBLICATIONS attoCATALOG-2015/16 | Page 334
attoMOTION – Accessories
PAGE 332
Accessories
optional items for the attoMOTION product line
Vacuum Feedthrough Solution - VFT
Connecting Premium Line positioners mounted in a vacuum chamber to the piezo
controller requires an additional feedthrough solution. attocube’s VFT packages
comprise flanges, electrical feedthroughs, and suitable cabling.
Article
Art. No.
open loop positioners
VFT3/KF40
1005059
VFT3/CF40
1005063
scanners
VFT7/SCN/KF40
1005060
VFT7/SCN/CF40
1005064
/NUM positioners
VFT1/NUM/KF40
1005062
VFT3/NUM/KF63
1008620
VFT1/NUM/CF40
1005066
VFT3/NUM/CF63
1005068
/RES positioners
VFT3/RES/KF40
1007674
VFT3/RES/CF40
1005065
Vacuum Feedthrough Solution - EVFT
Connecting Industrial Line positioners mounted in a vacuum chamber to the
ECC100 requires an additional feedthrough solution. attocube’s EVFT packages
comprise flanges, electrical feedthroughs, and suitable cabling.
Article
Art. No.
EVFT1/NUM/KF40
1008291
EVFT3/NUM/KF63
1009956
EVFT1/NUM/CF40
1008292
EVFT3/NUM/CF63
1008294