attoPUBLICATIONS attoCATALOG-2015/16 | Page 331
Industrial Line
PAGE 329
Product Name
top view
bottom view
75
50
25
25
30
25
20
15
outer position
25
25
9.5
81.6
80
60
ECS3080
inner position
16xM2 2.3
12 x M2.5
8 x cntrb. f. M2
51.6
50
ECS5050
15
9.5
45
45
35
25
15
12x M2 2.3
4x cntrb. f. M2,
M2.5
51.6
50
51.6
50
61.1
19.4
45
35
25
45
35
25
61.1
19.4
5°
ECGt5050
12x M2 2.3
12x M2 2.3
51.6
50
51.6
50
5°
45
35
25
45
35
25
62.5
62.5
19.5
19.5
5°
ECGp5050
12x M2 2.3
5°
12x M2 2.3
attoMOTION
Piezo-based Nano Drives