attoPUBLICATIONS attoCATALOG-2015/16 | Page 327
ECR3030 - ECR3030/NUM | open loop & closed loop
nanoprecise stepper rotator
°C
5E-11 mbar
360° endless
2 kg
Size and Dimensions
0 °.. 100 °C
Coarse Positioning Mode
footprint; height
30 x 30; 13.5 mm
travel range (step mode)
360 ° endless
weight (aluminum/stainless steel)
28/66 g
typical minimum step size
0.4 m°
max. drive velocity (@ 300 K, no load)
10 °/s
Materials
positioner body
aluminum / stainless steel
Fine Positioning Mode
actuator
PZT ceramics
fine positiong range
0 .. 12 m°
bearings
stainless steel
fine positioning resolution
μ°
connecting wires
insulated twisted pair, copper
Accuracy of Movement (open loop)
Options
repeatability of step sizes
typically 5 % over full range
environmental options
/RT, /HV, /UHV
forward / backward step asymmetry
10%
material option
/Al, /StSt
wobble
±6 mrad
encoder options
/NUM
Accuracy of Positioning (closed loop)
Compatibility with Electronics
open / closed loop controller
ECC100
position resolution
0.01 m°
repeatability
1 m°
Load @ Ambient Conditions (mounting orientation: axis vertical)
maximum vertical load
20 N (2 kg)
maximum dynamic torque along the axis 2 Ncm
technical drawings can be found on page 330
attoMOTION
Piezo-based Nano Drives
Industrial Line
PAGE 325