attoPUBLICATIONS attoCATALOG-2015/16 | Page 311
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bottom view
1.5
5
side view
top view
inner position
side view
15
R1.6
10
1.5
M2
5
3
7
15
3
2.5
2 x M1.6
for mounting top plate
2x M2.5
ANSxyz50
2
11
6
10
4x cntrb. f. M1.6
10
24
2
10
24
5
ANSxyz100
6 x M2
11
13
5
3 X 45°
10
5
2x M2 4
for mounting top plate
11
4 x M1.6 2
2x M2.5
3
20
5
2x M2 4
for mounting top plate
11
2
11
10
2
attoMOTION
Piezo-based Nano Drives
5