attoPUBLICATIONS attoCATALOG-2015/16 | Page 311

Scanners PAGE 309 bottom view 1.5 5 side view top view inner position side view 15 R1.6 10 1.5 M2 5 3 7 15 3 2.5 2 x M1.6 for mounting top plate 2x M2.5 ANSxyz50 2 11 6 10 4x cntrb. f. M1.6 10 24 2 10 24 5 ANSxyz100 6 x M2 11 13 5 3 X 45° 10 5 2x M2 4 for mounting top plate 11 4 x M1.6 2 2x M2.5 3 20 5 2x M2 4 for mounting top plate 11 2 11 10 2 attoMOTION Piezo-based Nano Drives 5