PAGE 302
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ANSxyz50
compact open loop xyz-scanner
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
Size and Dimensions
30 x 30 x 4.3 µm3
50 g
Fine Positioning Mode
footprint; height
15 x 15; 13 mm
weight
11,5 g
Materials (non-magnetic)
fine positiong range
30 x 30 x 4.3 µm3 @ 300 K
15 x 15 x 2 µm3 @ 4 K
fine positioning resolution
sub-nm
positioner body
titanium
Accuracy of Movement (open loop)
actuator
PZT ceramics
scan repeatability
typically 0.1 %
connecting wires
insulated twisted pair, copper
creep
typically 0.5 - 0.8 % per decade of time
linearity
typically 5 - 10 %
Options
environmental options
/RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV
Load @ Ambient Conditions (mounting orientation: axis horizontal)
material option
/CuBe
maximum vertical load
1 N (100 g)
encoder options
---
maximum torque on the axis
10 Ncm
Compatibility with Electronics
open loop controller
ANC300: ANM200, ANM300
closed loop controller
ANC350/SCAN
* measured by maximum deviation from linear fit on full range
technical drawings can be found from page 308