Scanners
PAGE 299
ANSz100/std
ANSz100/lr
/RT,
ANSxzy100/hs
/HV,
/UHV,
/LT,
ANSxyz100/std
/LT/HV,
ANSx150
/LT/UHV
---
---
---
---
---
---
---
---
---
---
24 x24 x 10
24 x24 x 10
24 x24 x 10
24 x24 x 10
24 x24 x 9
24
50
40 x 40 x 4.3
50 x 50 x 24
80
15
30
9x9x2
30 x 30 x 15
125
1
1
1
1
1
temperature
range
vacuum
range
magnetic
field range
travel
range
load
closed loop
resolution
attoMOTION
Piezo-based Nano Drives