attoPUBLICATIONS attoCATALOG-2015/16 | Page 269
Linear
Positioners
PAGE 267
bottom view
2x M2.5
inner position
outer position
top view
11
28
11
20
6x M2
2.8
2
2x M2.5
11
outer position
6
11,5
6,5
2.5
2.5
inner position
24
2
6
inner position
11
ANPx101/NUM
2,5
2,5
2
24
2x M2.5
2x M2.5 3.4
28
20
10x M2
3.3
25
11
20
ANPz101/NUM
20
2x M2.5
11 20
20
6.5
6.5
3.4
25
10.5
2
20
3.4
27
32
6,5
20
24
2x M2.5
2 xM2.5
3.4
28
44
6.5
20
32
11
10x M2 3.3
20
44
32
6.5
ANPz101eXT12/
NUM
3.5
17.5
11
20
2
20
attoMOTION
Piezo-based Nano Drives