attoPUBLICATIONS attoCATALOG-2015/16 | Page 267
Linear
Positioners
PAGE 265
bottom view
2.5
2 x M2
inner position
outer position
top view
inner position
inner position
outer position
10
2.2
2x M2
2.5
10
9.2
10
2
4 x M1.6
19
1.5
1.5
2.2
10
9.2
2.5
1.5
2.5
°
1.5
15
ANPx51/NUM
15
5
2x M2
13,5
5
2x M2
16
19
4x M1.6
2
13.5
10
5
2.5
5
ANPz51/NUM
10
6
5
2x M2 5
17
23
5
5
attoMOTION
Piezo-based Nano Drives
16