FPS Sensor
Systems
PAGE 194
FPS Sensor Systems – Interfaces
real-time connectivity
FPS sensor systems are designed for ease of use and simple connectivity.
Measured displacement information can be transferred to a personal
computer using USB or Ethernet (optional), where the advanced measurement software of the FPS allows synchronous data visualization,
analysis, and storage. In addition to these standard interfaces, the FPS
offers stand-alone operation capabilities through high-speed real-time
digital interfaces. For each interferometer axis, an incremental AquadB
and an absolute 8-48 bit high speed serial word (HSSL) interface is
available. The resolution of both AquadB and HSSL interfaces is
user-adjustable, as well as their clock rate (up to 25 MHz).
45 mm
214 mm
1
6
5
4
3
2
214 mm
Interface Specifications
target velocity [m/s]
0.00001
0.001
0.01
0.1
1
resolution USB (abs.) 64 bit, 100 kHz [nm]
0.001
0.001
0.001
0.001
0.001
resolution HSSL (abs.) 8-48 bit, up to 25 MHz [nm]
0.001
0.001
0.001
0.001
0.001
resolution AquadB (inc.) at 25 MHz [nm]
0.004
0.04
0.4
4
40