attoPUBLICATIONS attoCATALOG-2015/16 | Page 124

attoSHPM PAGE 122 Specifications attoSHPM General Specifications type of instrument Scanning Hall Probe Microscope with STM tip for tip-sample distance control sensor head specifics MBE grown hall cross sensor (GaAs/AlGaAs heterostructure) on a 2-axis tiltable sensor mount Operation Modes imaging modes constant height slope compensation 2 axis scan plane correction z feedback STM distance tracking (usually only for autoapproach) Resolution* size of Hall cross on sensor 400 nm (high resolution); 250 mm (ultra high resolution) field sensitivity @ 4 K 1500 V/AT noise-equivalent magnetic field (theoretical) 15 nT/√Hz @ 4 K and 40 μA Hall current 80 nT/√Hz @ 77 K and 40 μA Hall current typical attainable field detection limit (measured) 15 μT typ. (bandwith 10 Hz @ frequency 277 Hz) z bit resolution @ 4 K 57 pm at 15 μm scan range Sample Positioning total travel range 5 x 5 x 5 mm³ (open loop) step size 0.05..3 μm @ 300 K, 10..500 nm @ 4 K fine scan range 50 x 50 x 24 μm³ @ 300 K 30 x 30 x 15 μm³ @ 4 K closed loop scanning optional sample holder ASH/QE/4CX quick-exchange sample holder with 8 electrical contacts, integrated heater calibrated temperature sensor Suitable Operating Conditions temperature range 1.5 K..300 K (dependent on cryostat); mK compatible setup available on request magnetic field range 0..15 T+ (dependent on magnet) operating pressure designed for He exchange gas (vacuum compatible version down to 1E-6 mbar on request) Suitable Cooling Systems titanium housing diameter 48 mm bore size requirement designed for a 2" (50.8 mm) cryostat/magnet bore compatible cryostats attoDRY1000/1100/2100 attoLIQUID1000/2000/3000/5000 Electronics scan controller and software ASC500 (for detailed specifications please see attoCONTROL section) Options closed loop upgrade for coarse positioners resistive encoder, range 5 mm, sensor resolution approx. 200 nm, repeatability 1-2 μm in-situ inspection optics tip/sample monitoring via in-situ LT-LED for illumination, mirrors, lenses and CCD camera (outside of cryostat) field of view approx. 3 mm x 2 mm, res closed loop scanning upgrade interferometric encoders available * Resolution may vary depending on applied tip, sample, and cryostat The attoSHPM microscope stick